Lateral Electrochemical Metallization Cells for Reconfigurable Interconnect Systems
نویسندگان
چکیده
Lateral electrochemical metallization (ECM) cells are fabricated with a combined spacer/damascene process. The process allows the realization of nanoscale geometrical distances between two electrodes independent lithography. Such lateral ECM an essential part in reconfigurable interconnect system that may yield strongly increased connectivity artificial neural networks. show memristive properties comparable to vertical switching voltages range -1.5 V 2.5 V. influence electrode line edge roughness on SET kinetics such is investigated via kinetic Monte Carlo simulations, finding minor time variability.
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ژورنال
عنوان ژورنال: IEEE Journal of the Electron Devices Society
سال: 2023
ISSN: ['2168-6734']
DOI: https://doi.org/10.1109/jeds.2023.3297855